Defining Next Generation CMP Pad Technology
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Micro-ChannelTM: The next generation CMP pad platform
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innoPad CW
Drop-in. Optimize. Customize.
innoPad CW Family
- Soft pad products designed as drop-in replacements for PANWU and Prism pads
- Products designed specifically for Tungsten CMP using ferric nitride slurry
- No conditioning required
- Multiple sizes available
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