Micro-Channel^TM: The next generation CMP pad platform

innoPad has developed a novel, patented technology platform based upon over 10 years of CMP pad research. With our configurable Micro-Channel^TM technology innoPad provides a drop-in solution today and a customizable next generation CMP platform for tomorrow.

• An entirely new approach to pad design. innoPad's patented Micro-Channel^TM technology is a complete departure from the traditional micro-sphere CMP pad technology, and represents a new direction in CMP pad design. Micro-Channel^TM give innoPad the ability to independently control the surface and the bulk properties of our CMP pads with unsurpassed precision. With Micro-Channel^TM technology, innoPad delivers true next generation CMP pad technology to meet existing and future customer requirements.
• Tunable architecture. innoPad's unique pad architecture using Micro-Channel^TM and single pad manufacturing gives us the ability to precisely control the properties of our finished pads. Pads are manufactured at innoPad's own ISO 9001:2000 certified manufacturing facilities. With this capability we can work with our customers to develop CMP pads customized to individual applications in ways that were never before possible. One size does not fit all. innoPad can build a pad with the performance characteristics that the customer needs.
• Patent independence. With a novel pad architecture, innoPad offers customers a technology platform built around a broad portfolio of intellectual property. Our legal team has analyzed over 20 years of CMP patent history and confirmed that our technology platform is unique. Legal opinion letters are available to interested customers.

To learn more about innoPad's patented Micro-Channel^TM technology, customers should contact us.